TY - JOUR
T1 - Temperature dependence thermal conductivity measurement of indium-gallium-zinc-oxide thin films utilizing 3ω Method
AU - Khan, Rauf
AU - Chang-Hoon, Shim
AU - Hattori, Reiji
AU - Ohtaki, M.
AU - Miyazaki, K.
N1 - Funding Information:
The authors are grateful to T. Yabuki, Associate Professor, and K. Kuriyama, master course student of Kyushu Institute of Technology, Kitakyushu, Japan for their kind support during the measurement of thermal conductivity. The microstructure analysis of our sample was carried out at the Ultramicroscopy Research Center, Kyushu University. This work was supported by Advanced Graduate Program in Global Strategy for Green Asia, Kyushu University, Japan.
Publisher Copyright:
© 2020 ITE and SID.
PY - 2021/12/9
Y1 - 2021/12/9
N2 - The temperature dependence of the cross-plane thermal conductivity of Indium-Gallium-Zinc-Oxide (IGZO) thin film was measured using a differential three-omega method. The IGZO thin films were deposited on Al2O3 substrate by DC sputtering at room temperature. The thermal conductivities were observed to be 1.6, 1.8, and 2.6 W/(m·K) at some different oxygen partial pressures, 0%, 10%, and 65%, respectively. Furthermore, the thermal conductivity of IGZO thin film is decreasing with increasing the measurement ambient temperature according to the crystalline material typical characteristics. These results notify that a crystallinity exists inside the IGZO films and this crystalline phase governs the heat conduction into IGZO films.
AB - The temperature dependence of the cross-plane thermal conductivity of Indium-Gallium-Zinc-Oxide (IGZO) thin film was measured using a differential three-omega method. The IGZO thin films were deposited on Al2O3 substrate by DC sputtering at room temperature. The thermal conductivities were observed to be 1.6, 1.8, and 2.6 W/(m·K) at some different oxygen partial pressures, 0%, 10%, and 65%, respectively. Furthermore, the thermal conductivity of IGZO thin film is decreasing with increasing the measurement ambient temperature according to the crystalline material typical characteristics. These results notify that a crystallinity exists inside the IGZO films and this crystalline phase governs the heat conduction into IGZO films.
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M3 - Conference article
AN - SCOPUS:85119962368
VL - 27
SP - 162
EP - 165
JO - Proceedings of the International Display Workshops
JF - Proceedings of the International Display Workshops
SN - 1883-2490
T2 - 27th International Display Workshops, IDW 2020
Y2 - 9 December 2020 through 11 December 2020
ER -