The 24th Symposium on Plasma Science for Materials (SPSM-24)

T. Shirafuji; Y. Setsuhara; M. Shiratani; T. Kaneko; T. Watanabe; N. Ohtake

doi:10.1016/j.tsf.2012.10.002

The 24th Symposium on Plasma Science for Materials (SPSM-24)

T. Shirafuji, Y. Setsuhara, M. Shiratani, T. Kaneko, T. Watanabe, N. Ohtake

Electronic Devices

Research output: Contribution to journal › Editorial › peer-review

Original language	English
Pages (from-to)	1
Number of pages	1
Journal	Thin Solid Films
Volume	523
DOIs	https://doi.org/10.1016/j.tsf.2012.10.002
Publication status	Published - Nov 15 2012

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2012.10.002

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title = "The 24th Symposium on Plasma Science for Materials (SPSM-24)",

author = "T. Shirafuji and Y. Setsuhara and M. Shiratani and T. Kaneko and T. Watanabe and N. Ohtake",

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language = "English",

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journal = "Thin Solid Films",

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AU - Shirafuji, T.

AU - Setsuhara, Y.

AU - Shiratani, M.

AU - Kaneko, T.

AU - Watanabe, T.

AU - Ohtake, N.

PY - 2012/11/15

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VL - 523

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JO - Thin Solid Films

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The 24th Symposium on Plasma Science for Materials (SPSM-24)

All Science Journal Classification (ASJC) codes

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