The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping

Sang In Eom; Yasuhiro Takaya; Takashi Miyoshi; Terutake Hayashi

doi:10.1117/12.682301

The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping

Sang In Eom, Yasuhiro Takaya, Takashi Miyoshi, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.

Original language	English
Title of host publication	Optical Trapping and Optical Micromanipulation III
Volume	6326
DOIs	https://doi.org/10.1117/12.682301
Publication status	Published - Dec 1 2006
Externally published	Yes
Event	Optical Trapping and Optical Micromanipulation III - San Diego, CA, United States Duration: Aug 13 2006 → Aug 17 2006

Other

Other	Optical Trapping and Optical Micromanipulation III
Country	United States
City	San Diego, CA
Period	8/13/06 → 8/17/06

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "The 3D manipulation of a microsphere for nano-CMM probe using single fiber optical trapping",

abstract = "We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.",

author = "Eom, {Sang In} and Yasuhiro Takaya and Takashi Miyoshi and Terutake Hayashi",

year = "2006",

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doi = "10.1117/12.682301",

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AU - Eom, Sang In

AU - Takaya, Yasuhiro

AU - Miyoshi, Takashi

AU - Hayashi, Terutake

PY - 2006/12/1

Y1 - 2006/12/1

N2 - We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.

AB - We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.

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