Abstract
We suggest a novel 3-D probing technique for measuring micro parts which have high aspect ratio such as a groove or a deep-hole. This technique uses the optical force exerted on a dielectric microsphere at the tip of optical fiber so called the fiber optical trapping. A microsphere is trapped at the tip of an optical fiber which has micrometer size of the diameter and sub micrometer size of the tapered tip. The optical source is a Nd:YAG laser with the wavelength of 1064 nm. A fiber optical trapping system is quite similar to a conventional CMM. The roll of a microsphere is the same as the probe sphere of a conventional CMM and an optical fiber works as a stylus shaft. The micro optical fiber part is thinner than the diameter of the microsphere and longer than the depth of shapes such as deep holes and grooves, which enable to make an approach to a steep angle surface of a work piece with high aspect ratio.
Original language | English |
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Title of host publication | Optical Trapping and Optical Micromanipulation III |
Volume | 6326 |
DOIs | |
Publication status | Published - Dec 1 2006 |
Externally published | Yes |
Event | Optical Trapping and Optical Micromanipulation III - San Diego, CA, United States Duration: Aug 13 2006 → Aug 17 2006 |
Other
Other | Optical Trapping and Optical Micromanipulation III |
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Country | United States |
City | San Diego, CA |
Period | 8/13/06 → 8/17/06 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering