The Critical Shear Stress for Slip Generation due to Scratches in Silicon Wafers

Jun Fujise, Bonggyun Ko, Toshiaki Ono, Masaki Tanaka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number055012
Number of pages7
JournalECS Journal of Solid State Science and Technology
Volume9
Publication statusPublished - Jun 17 2020

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