The effect of oxygen on the brittle-to-ductile transition in silicon single crystals

Youn Jeong Hong, Masaki Tanaka, Kenji Higashida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The brittle-to-ductile transition (BDT) in Czochralski (CZ) grown silicon single crystals and floating-zone (FZ) grown silicon single crystals was investigated by three-point bending. The temperature dependence of the apparent fracture toughness was measured in three different cross-head speeds. It was found that the BDT temperature in the CZ silicon crystal was higher than that in FZ silicon crystal, suggesting that the solute oxygen decreases dislocation mobility. However, the activation energies obtained from the strain rate dependence of the BDT temperatures were nearly the same in both the CZ and FZ silicon crystals, indicating that the dislocation mobility is not influenced by the solute oxygen. In this paper, the origin of the difference in the BDT temperature is discussed, focusing the role of the solute oxygen on the dislocation glide.

Original languageEnglish
Title of host publicationPRICM7
Pages1299-1302
Number of pages4
DOIs
Publication statusPublished - Aug 17 2010
Event7th Pacific Rim International Conference on Advanced Materials and Processing, PRICM-7 - Cairns, QLD, Australia
Duration: Aug 2 2010Aug 6 2010

Publication series

NameMaterials Science Forum
Volume654-656
ISSN (Print)0255-5476

Other

Other7th Pacific Rim International Conference on Advanced Materials and Processing, PRICM-7
CountryAustralia
CityCairns, QLD
Period8/2/108/6/10

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Hong, Y. J., Tanaka, M., & Higashida, K. (2010). The effect of oxygen on the brittle-to-ductile transition in silicon single crystals. In PRICM7 (pp. 1299-1302). (Materials Science Forum; Vol. 654-656). https://doi.org/10.4028/www.scientific.net/MSF.654-656.1299