The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser

Shinri Nonaka, Tastuhiro Mori, Yasuyuki Takata, Masamichi Kohno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.

Original languageEnglish
Title of host publicationASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
Pages275-280
Number of pages6
DOIs
Publication statusPublished - Dec 1 2012
EventASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012 - Rio Grande, Puerto Rico
Duration: Jul 8 2012Jul 12 2012

Publication series

NameASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012

Other

OtherASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
CountryPuerto Rico
CityRio Grande
Period7/8/127/12/12

Fingerprint

Ultrashort pulses
Laser beams
Laser pulses
Machining
Wavelength
Processing
Wear of materials
Lasers
Focused ion beams
Microchannels
Debris
Electron beams
Drilling
Polymers
Metals
Vacuum
Impurities
Glass
Fluids
Composite materials

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology

Cite this

Nonaka, S., Mori, T., Takata, Y., & Kohno, M. (2012). The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser. In ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012 (pp. 275-280). (ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012). https://doi.org/10.1115/ICNMM2012-73135

The effect of the laser beam wavelength and pulse width on micro grooving : Comparison of nanosecond and femtosecond laser. / Nonaka, Shinri; Mori, Tastuhiro; Takata, Yasuyuki; Kohno, Masamichi.

ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012. 2012. p. 275-280 (ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nonaka, S, Mori, T, Takata, Y & Kohno, M 2012, The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser. in ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012. ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012, pp. 275-280, ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012, Rio Grande, Puerto Rico, 7/8/12. https://doi.org/10.1115/ICNMM2012-73135
Nonaka S, Mori T, Takata Y, Kohno M. The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser. In ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012. 2012. p. 275-280. (ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012). https://doi.org/10.1115/ICNMM2012-73135
Nonaka, Shinri ; Mori, Tastuhiro ; Takata, Yasuyuki ; Kohno, Masamichi. / The effect of the laser beam wavelength and pulse width on micro grooving : Comparison of nanosecond and femtosecond laser. ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012. 2012. pp. 275-280 (ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012).
@inproceedings{07168fed43e344c2af2061261bd8942f,
title = "The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser",
abstract = "Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.",
author = "Shinri Nonaka and Tastuhiro Mori and Yasuyuki Takata and Masamichi Kohno",
year = "2012",
month = "12",
day = "1",
doi = "10.1115/ICNMM2012-73135",
language = "English",
isbn = "9780791844793",
series = "ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012",
pages = "275--280",
booktitle = "ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012",

}

TY - GEN

T1 - The effect of the laser beam wavelength and pulse width on micro grooving

T2 - Comparison of nanosecond and femtosecond laser

AU - Nonaka, Shinri

AU - Mori, Tastuhiro

AU - Takata, Yasuyuki

AU - Kohno, Masamichi

PY - 2012/12/1

Y1 - 2012/12/1

N2 - Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.

AB - Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.

UR - http://www.scopus.com/inward/record.url?scp=84882399402&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84882399402&partnerID=8YFLogxK

U2 - 10.1115/ICNMM2012-73135

DO - 10.1115/ICNMM2012-73135

M3 - Conference contribution

AN - SCOPUS:84882399402

SN - 9780791844793

T3 - ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012

SP - 275

EP - 280

BT - ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012

ER -