The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser

Shinri Nonaka, Tastuhiro Mori, Yasuyuki Takata, Masamichi Kohno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Processing technique of micro grooves and channels is very important to study the phenomenon of fluids in micro scale. Micro grooves and microchannels play an important role in various devices, such as μ-TAS (Micro-Total Analysis Systems) and micro reactors. Laser processing is currently widely used for drilling and grooving of various materials including metals, polymers, glasses and composite materials, since laser machining can avoid the problems that conventional machining methods have. For example wear of a working tool, lowering of processing accuracy, and wear debris becoming contaminants are some of the problems of the conventional method. Additionally, compared to other non-contact machining processes such as electron beam machining (EBM) and focused ion beam (FIB), machining a vacuum is not required. Therefore, applicability is wider and setup costs can be more economical.

Original languageEnglish
Title of host publicationASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
Pages275-280
Number of pages6
DOIs
Publication statusPublished - Dec 1 2012
EventASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012 - Rio Grande, Puerto Rico
Duration: Jul 8 2012Jul 12 2012

Publication series

NameASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012

Other

OtherASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels, ICNMM 2012 Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012
CountryPuerto Rico
CityRio Grande
Period7/8/127/12/12

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology

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  • Cite this

    Nonaka, S., Mori, T., Takata, Y., & Kohno, M. (2012). The effect of the laser beam wavelength and pulse width on micro grooving: Comparison of nanosecond and femtosecond laser. In ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conference and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012 (pp. 275-280). (ASME 2012 10th Int. Conf. on Nanochannels, Microchannels, and Minichannels Collocated with the ASME 2012 Heat Transfer Summer Conf. and the ASME 2012 Fluids Engineering Division Sum, ICNMM 2012). https://doi.org/10.1115/ICNMM2012-73135