The evaluation of temporary degradation in quarter micron MOSFET by hydrogen passivation of Boron

Keiichi Tsukamoto, Taizoh Sadoh, Akihiro Ikeda, Yukinori Kuroki

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'The evaluation of temporary degradation in quarter micron MOSFET by hydrogen passivation of Boron'. Together they form a unique fingerprint.

Engineering

Material Science