TY - JOUR
T1 - The influence of the repetition rate of laser pulses on the growth of diamond thin films by pulsed laser ablation of graphite
AU - Yoshitake, Tsuyoshi
AU - Hara, Takeshi
AU - Nagayama, Kunihito
N1 - Funding Information:
The film preparation using the ArF excimer laser was carried out at the Institute for Ionized Gas and Laser Research, Kyushu University, and the SEM and Raman spectrum measurements were made using equipment at the Center of Advanced Instrument Analysis, Kyushu University. This work is supported by Grant-in-Aid for Encouragement of Young Scientists (13750015) of the Japan Society for the Promotion of Science.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2003/3
Y1 - 2003/3
N2 - Using a pulsed laser deposition method, we fabricated diamond thin films homoepitaxially in an oxygen atmosphere at various repetition rates of laser pulses, and investigated the influence of the repetition rate of laser pulses on the growth of diamond thin film. As the repetition rate was raised from 5 to 50 Hz, the crystallite diameter, which is estimated from scanning electron microscopy images, increased from 0.1 to 1 μm. Based on the results, the growth process for various repetition rates is discussed.
AB - Using a pulsed laser deposition method, we fabricated diamond thin films homoepitaxially in an oxygen atmosphere at various repetition rates of laser pulses, and investigated the influence of the repetition rate of laser pulses on the growth of diamond thin film. As the repetition rate was raised from 5 to 50 Hz, the crystallite diameter, which is estimated from scanning electron microscopy images, increased from 0.1 to 1 μm. Based on the results, the growth process for various repetition rates is discussed.
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U2 - 10.1016/S0925-9635(02)00333-3
DO - 10.1016/S0925-9635(02)00333-3
M3 - Article
AN - SCOPUS:0038238378
VL - 12
SP - 306
EP - 309
JO - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 3-7
ER -