Using a pulsed laser deposition method, we fabricated diamond thin films homoepitaxially in an oxygen atmosphere at various repetition rates of laser pulses, and investigated the influence of the repetition rate of laser pulses on the growth of diamond thin film. As the repetition rate was raised from 5 to 50 Hz, the crystallite diameter, which is estimated from scanning electron microscopy images, increased from 0.1 to 1 μm. Based on the results, the growth process for various repetition rates is discussed.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanical Engineering
- Physics and Astronomy(all)
- Materials Chemistry
- Electrical and Electronic Engineering