An unsteady state plasma is known to exist during the initial stage of the glow discharge decomposition of silane (SiH4) gas. The properties of the i layer deposited in this unsteady state plasma and p-i-n stacked hydrogenated amorphous silicon solar cells having such an i layer were investigated. It was found that this layer had an undesirably wide optical band gap and low conductivity because of the large number of SiH2 sites.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry