The overview and future prospects for planarization CMP technology

Research output: Contribution to journalReview article

Original languageEnglish
Pages (from-to)213-216
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume84
Issue number3
DOIs
Publication statusPublished - Jan 1 2018

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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