The reason why thin-film silicon grows layer by layer in plasma-enhanced chemical vapor deposition

Physics

• Diffusivity 100%
• Model 75%
• Thin Films 50%
• Calculation 50%
• Sites 50%
• Growth 50%
• Silicon 25%
• Density Functional Theory 25%
• Alternatives 25%
• First-Principles 25%
• Molecular Dynamics 25%

Earth and Planetary Sciences

• Diffusion 100%
• Model 75%
• Growth 50%
• Calculation 50%
• Plasma 50%
• Thin Films 50%
• Alternative 25%
• Silicon 25%
• Density Functional Theory 25%
• Conflict 25%