Theoretical study of the composition pulling effect in InGaN metalorganic vapor-phase epitaxy growth

Yuya Inatomi, Yoshihiro Kangawa, Tomonori Ito, Tadeusz Suski, Yoshinao Kumagai, Koichi Kakimoto, Akinori Koukitu

Research output: Contribution to journalArticle

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Abstract

The composition pulling effect in metalorganic vapor-phase InGaN epitaxy was theoretically investigated by thermodynamic analysis. The excess energies of biaxial-strained InxGa1-xN were numerically calculated using empirical interatomic potentials considering different situations: (i) coherent growth on GaN(0001), (ii) coherent growth on In0.2Ga0.8N(0001), and (iii) bulk growth. Using the excess energies, the excess chemical potentials of InN and GaN alloys were computed. Our results show that compressive strain suppresses In incorporation, whereas tensile strain promotes it. Moreover, assuming chemical equilibrium, the relationship between the solid composition and the growth conditions was predicted. The results successfully reproduced the typical composition pulling effect.

Original languageEnglish
Article number078003
JournalJapanese Journal of Applied Physics
Volume56
Issue number7
DOIs
Publication statusPublished - Jul 1 2017

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Composition effects
Metallorganic vapor phase epitaxy
pulling
vapor phase epitaxy
Tensile strain
Chemical potential
chemical equilibrium
Thermodynamics
thermodynamics
energy
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Theoretical study of the composition pulling effect in InGaN metalorganic vapor-phase epitaxy growth. / Inatomi, Yuya; Kangawa, Yoshihiro; Ito, Tomonori; Suski, Tadeusz; Kumagai, Yoshinao; Kakimoto, Koichi; Koukitu, Akinori.

In: Japanese Journal of Applied Physics, Vol. 56, No. 7, 078003, 01.07.2017.

Research output: Contribution to journalArticle

Inatomi, Yuya ; Kangawa, Yoshihiro ; Ito, Tomonori ; Suski, Tadeusz ; Kumagai, Yoshinao ; Kakimoto, Koichi ; Koukitu, Akinori. / Theoretical study of the composition pulling effect in InGaN metalorganic vapor-phase epitaxy growth. In: Japanese Journal of Applied Physics. 2017 ; Vol. 56, No. 7.
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AU - Kumagai, Yoshinao

AU - Kakimoto, Koichi

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