Theoretical study on the effect of H2and NH3on trimethylgallium decomposition process in GaN MOVPE

Soma Sakakibara, Kenta Chokawa, Masaaki Araidai, Akira Kusaba, Yoshihiro Kangawa, Kenji Shiraishi

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Theoretical study on the effect of H<sub>2</sub>and NH<sub>3</sub>on trimethylgallium decomposition process in GaN MOVPE'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy