Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Masaharu Shiratani, Kazunori Koga, Kunihiro Kamataki, Shinya Iwashita, Giichiro Uchida, Hyunwoong Seo, Naho Itagaki

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

We propose a simple theoretical model that describes the correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas. The model predicts that the high density of nanoparticles brings about small mean size, narrow size dispersion, and sharp size slope on the large side of the size distribution. The model suggests some methods of tuning the size dispersion, and it also suggests that a self-limiting process is the key to markedly suppressing fluctuations in nanostructure fabrication. All predictions coincide with the experimental results reported previously. Moreover, the model suggests that plasma fluctuation induces both the linear and nonlinear responses of nanoparticle growth.

Original languageEnglish
Article number010201
JournalJapanese journal of applied physics
Volume53
Issue number1
DOIs
Publication statusPublished - Jan 2014

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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