Thermal transport and thermal stress in a molybdenum film-glass substrate system

Tingting Miao, Weigang Ma, Shen Yan, Xing Zhang, Masamichi Kohno, Yasuyuki Takata, Yoshifumi Ikoma

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Three-dimensional integration with through-silicon vias is emerging as an approach for improving the performance of integrated circuits. Thermal transport and thermal stress in such designs currently limit their performance and reliability. In this study, the thermal dissipation and thermal stress in a 95.3-nm-thick molybdenum (Mo) film-glass substrate system were investigated using a picosecond laser pump-probe method with four different configurations. This allowed the thermal transport and the generation and propagation of coherent acoustic phonon waves in a Mo film-glass substrate system to be comprehensively studied for the first time. The universality of the superposition model previously proposed for a platinum film on a glass substrate was verified using the present Mo film-glass substrate system from the close agreement between experimental data and theoretical predictions. The thermal transport in the Mo film and the coherent acoustic phonon wave propagation in the Mo film and glass substrate, i.e., thermal diffusivity and longitudinal sound velocity, respectively, were also studied.

Original languageEnglish
Article number021801
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume34
Issue number2
DOIs
Publication statusPublished - Mar 1 2016

Fingerprint

Molybdenum
thermal stresses
Thermal stress
molybdenum
Glass
glass
Substrates
Acoustics
acoustics
Thermal diffusivity
Acoustic wave velocity
Silicon
thermal diffusivity
Platinum
acoustic velocity
Wave propagation
integrated circuits
Integrated circuits
Hot Temperature
wave propagation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

Cite this

Thermal transport and thermal stress in a molybdenum film-glass substrate system. / Miao, Tingting; Ma, Weigang; Yan, Shen; Zhang, Xing; Kohno, Masamichi; Takata, Yasuyuki; Ikoma, Yoshifumi.

In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, Vol. 34, No. 2, 021801, 01.03.2016.

Research output: Contribution to journalArticle

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