Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy

Akira Kusaba, Yoshihiro Kangawa, Pawel Kempisty, Hubert Valencia, Kenji Shiraishi, Yoshinao Kumagai, Koichi Kakimoto, Akinori Koukitu

Research output: Contribution to journal › Article

10 Citations (Scopus)

Abstract

We performed a thermodynamic analysis of GaN metalorganic vapor phase epitaxy considering the (0001) and (0001) surface states. Surface reconstruction, which depends on growth conditions such as temperature and partial pressure, affects growth processes. To discuss the effects of surface states on growth processes, we investigated the driving force of precursor deposition to form the surface phase defined stoichiometrically. In both N2 and H2 carrier gas cases, we showed surface phase diagrams, calculated driving forces, and discussed the difference in growth orientation.

Original languageEnglish
Article number070304
JournalJapanese Journal of Applied Physics
Volume56
Issue number7
DOIs
Publication statusPublished - Jul 1 2017

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Metallorganic vapor phase epitaxy
vapor phase epitaxy
Thermodynamics
thermodynamics
Surface states
Surface reconstruction
Partial pressure
Phase diagrams
partial pressure
phase diagrams
Gases
gases
Temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Kusaba, A., Kangawa, Y., Kempisty, P., Valencia, H., Shiraishi, K., Kumagai, Y., ... Koukitu, A. (2017). Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy. Japanese Journal of Applied Physics, 56(7), [070304]. https://doi.org/10.7567/JJAP.56.070304

Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy. / Kusaba, Akira; Kangawa, Yoshihiro; Kempisty, Pawel; Valencia, Hubert; Shiraishi, Kenji; Kumagai, Yoshinao; Kakimoto, Koichi; Koukitu, Akinori.

In: Japanese Journal of Applied Physics, Vol. 56, No. 7, 070304, 01.07.2017.

Research output: Contribution to journal › Article

Kusaba, A, Kangawa, Y, Kempisty, P, Valencia, H, Shiraishi, K, Kumagai, Y, Kakimoto, K & Koukitu, A 2017, 'Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy', Japanese Journal of Applied Physics, vol. 56, no. 7, 070304. https://doi.org/10.7567/JJAP.56.070304
Kusaba A, Kangawa Y, Kempisty P, Valencia H, Shiraishi K, Kumagai Y et al. Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy. Japanese Journal of Applied Physics. 2017 Jul 1;56(7). 070304. https://doi.org/10.7567/JJAP.56.070304
Kusaba, Akira ; Kangawa, Yoshihiro ; Kempisty, Pawel ; Valencia, Hubert ; Shiraishi, Kenji ; Kumagai, Yoshinao ; Kakimoto, Koichi ; Koukitu, Akinori. / Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy. In: Japanese Journal of Applied Physics. 2017 ; Vol. 56, No. 7.
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