Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy

Akira Kusaba; Yoshihiro Kangawa; Pawel Kempisty; Hubert Valencia; Kenji Shiraishi; Yoshinao Kumagai; Koichi Kakimoto; Akinori Koukitu

doi:10.7567/JJAP.56.070304

Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy

Akira Kusaba, Yoshihiro Kangawa, Pawel Kempisty, Hubert Valencia, Kenji Shiraishi, Yoshinao Kumagai, Koichi Kakimoto, Akinori Koukitu

Division of Renewable Energy Dynamics

Research output: Contribution to journal › Article

16 Citations (Scopus)

Abstract

We performed a thermodynamic analysis of GaN metalorganic vapor phase epitaxy considering the (0001) and (0001) surface states. Surface reconstruction, which depends on growth conditions such as temperature and partial pressure, affects growth processes. To discuss the effects of surface states on growth processes, we investigated the driving force of precursor deposition to form the surface phase defined stoichiometrically. In both N₂ and H2 carrier gas cases, we showed surface phase diagrams, calculated driving forces, and discussed the difference in growth orientation.

Original language	English
Article number	070304
Journal	Japanese Journal of Applied Physics
Volume	56
Issue number	7
DOIs	https://doi.org/10.7567/JJAP.56.070304
Publication status	Published - Jul 2017

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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Kusaba, A., Kangawa, Y., Kempisty, P., Valencia, H., Shiraishi, K., Kumagai, Y., Kakimoto, K., & Koukitu, A. (2017). Thermodynamic analysis of (0001) and (0001) GaN metalorganic vapor phase epitaxy. Japanese Journal of Applied Physics, 56(7), [070304]. https://doi.org/10.7567/JJAP.56.070304

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AU - Kusaba, Akira

AU - Kangawa, Yoshihiro

AU - Kempisty, Pawel

AU - Valencia, Hubert

AU - Shiraishi, Kenji

AU - Kumagai, Yoshinao

AU - Kakimoto, Koichi

AU - Koukitu, Akinori

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AB - We performed a thermodynamic analysis of GaN metalorganic vapor phase epitaxy considering the (0001) and (0001) surface states. Surface reconstruction, which depends on growth conditions such as temperature and partial pressure, affects growth processes. To discuss the effects of surface states on growth processes, we investigated the driving force of precursor deposition to form the surface phase defined stoichiometrically. In both N2 and H2 carrier gas cases, we showed surface phase diagrams, calculated driving forces, and discussed the difference in growth orientation.

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