Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications

Masaki Hirota, Fuminori Satou, Shinichi Morita

Research output: Contribution to journalArticle

Abstract

This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4„ layer deposited by LP-CVD achieve both high responsivity and an excellent time constant A prototype sensor, having external dimensions of 160 µmx 160 µm and six pairs of thermopiles, achieved responsivity of 2100 VAV and a time constant of 25 msec at a pressure of 7.33 Pa. This performance is suitable for automotive appEcations.

Original languageEnglish
Pages (from-to)325-330
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume121
Issue number6
DOIs
Publication statusPublished - Jan 1 2001
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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