Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane

Maiko Nishibori, Woosuck Shin, Noriya Izu, Toshio Itoh, Ichiro Matsubara

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Micro-multi-gas sensor (micro-MGS) of 3 thermoelectric devices with 3 different combustion catalysts was developed. Using the micro-heater meanders of Pt/Pt-W thin film, the temperature of the Pt/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts were controlled to be 360, 240 and 140 °C for the selective combustion of CH4, CO and H2, respectively. The gas sensing performance of the micro-TGS for the gas mixture of 0.5-vol.%CH4 + 0.5-vol%CO + 0.5-vol%H2 was been investigated. The Pd/Al2O3 burned all gases and the Au/Co3O4 could burn CO selectively. The Pt/Al2O3 burned H2 and CO by controlling the temperature of the catalyst. The selectivity of this micro-MGS with the Pd/Al2O3, Au/Co3O4 and Pt/Al2O3 catalysts is higher than that of a SnO 2 based thick-film sensor array for H2, CO, CH 4. From the voltage signal from 3 different sensor elements, the micro-MGS could estimate the gas concentration selectively without any gas separation tool.

Original languageEnglish
Pages (from-to)773-777
Number of pages5
JournalSensor Letters
Volume9
Issue number2
DOIs
Publication statusPublished - Apr 1 2011
Externally publishedYes

Fingerprint

Chemical sensors
Carbon monoxide
carbon monoxide
Methane
methane
Hydrogen
Catalysts
sensors
hydrogen
Gases
gases
catalysts
Catalyst selectivity
Sensor arrays
Thick films
Gas mixtures
meanders
Thin films
Temperature
heaters

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane. / Nishibori, Maiko; Shin, Woosuck; Izu, Noriya; Itoh, Toshio; Matsubara, Ichiro.

In: Sensor Letters, Vol. 9, No. 2, 01.04.2011, p. 773-777.

Research output: Contribution to journalArticle

Nishibori, Maiko ; Shin, Woosuck ; Izu, Noriya ; Itoh, Toshio ; Matsubara, Ichiro. / Thermoelectric micro-multi-gas sensor for the detection of hydrogen, carbon monoxide and methane. In: Sensor Letters. 2011 ; Vol. 9, No. 2. pp. 773-777.
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