Thin CoSi_2 Formation on SiO_2 with Low-Energy Ion Irradiation

Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	6117-6122
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	37
Issue number	11
Publication status	Published - Nov 15 1998

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@article{9f84743649ed4ce2b76e3ed7ba8896b6,

title = "Thin CoSi_2 Formation on SiO_2 with Low-Energy Ion Irradiation",

author = "Atsushi Matsushita and Taizoh Sadoh and Toshio Tsurushima",

year = "1998",

month = nov,

day = "15",

language = "English",

volume = "37",

pages = "6117--6122",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

publisher = "IOP Publishing Ltd.",

number = "11",

}