Thin CoSi_2 Formation on SiO_2 with Low-Energy Ion Irradiation

Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)6117-6122
Number of pages6
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume37
Issue number11
Publication statusPublished - Nov 15 1998

Cite this