Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation

Translated title of the contribution: Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation

Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima

Research output: Contribution to journalArticlepeer-review

Translated title of the contributionThin CoSi2Formation on SiO2with Low-Energy Ion Irradiation
Original languageUndefined/Unknown
Pages (from-to)6117-6122
Number of pages6
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume37
Issue number1
Publication statusPublished - Nov 15 1998

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