Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation

Translated title of the contribution: Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation

Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima

Research output: Contribution to journal › Article › peer-review

Translated title of the contribution	Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation
Original language	Undefined/Unknown
Pages (from-to)	6117-6122
Number of pages	6
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	37
Issue number	1
Publication status	Published - Nov 15 1998

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@article{f1445b6c3c19457e99e4317ea6cc6666,

title = "Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation",

author = "Atsushi Matsushita and Taizoh Sadoh and Toshio Tsurushima",

year = "1998",

month = nov,

day = "15",

language = "未定義/不明",

volume = "37",

pages = "6117--6122",

journal = "Japanese Journal of Applied Physics, Part 2: Letters",

issn = "0021-4922",

publisher = "IOP Publishing Ltd.",

number = "1",

}