Translated title of the contribution | Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation |
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Original language | Undefined/Unknown |
Pages (from-to) | 6117-6122 |
Number of pages | 6 |
Journal | Japanese Journal of Applied Physics, Part 2: Letters |
Volume | 37 |
Issue number | 1 |
Publication status | Published - Nov 15 1998 |
Thin CoSi2Formation on SiO2with Low-Energy Ion Irradiation
Atsushi Matsushita, Taizoh Sadoh, Toshio Tsurushima
Research output: Contribution to journal › Article › peer-review