Abstract
Polypropylene (PP) beads were coated with SiO x and TiO 2 single-layer films and TiO 2/SiO x doublelayer films via rotating cylindrical plasma chemical vapor deposition (PCVD). The thicknesses of the SiOx and TiO 2 single-layer films and TiO 2/SiO x double-layer films could be easily controlled by changing the deposition time. The properties of the thin films were characterized via scanning electron microscopy and energy-dispersive X-ray spectroscopy. The double layers that were spread on PP beads were found to be TiO 2/SiO 1.72. It was found that the rotating cylindrical PCVD process can be used for coating particles with single- and double-layer films.
Original language | English |
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Pages (from-to) | 264-267 |
Number of pages | 4 |
Journal | Journal of Nanoelectronics and Optoelectronics |
Volume | 6 |
Issue number | 3 |
DOIs | |
Publication status | Published - Aug 2011 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering