Original language | English |
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Number of pages | 1 |
Journal | Thin Solid Films |
Volume | 457 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jun 1 2004 |
Externally published | Yes |
Event | 16th Symposium on Plasma Science for Materials (SPSM-16) - Tokyo, Japan Duration: Jun 4 2003 → Jun 5 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry