Thomson scattering diagnostics of a discharge-pumped excimer laser

Hideo Yamakoshi; Mitsuo Kato; Kiichiro Uchino; Tsunehisa Iwata; Mitsuharu Masuda; Katsunori Muraoka; Mitsuo Maeda; Masanori Akazaki

doi:10.1143/JJAP.28.L1589

Thomson scattering diagnostics of a discharge-pumped excimer laser

Hideo Yamakoshi, Mitsuo Kato, Kiichiro Uchino, Tsunehisa Iwata, Mitsuharu Masuda, Katsunori Muraoka, Mitsuo Maeda, Masanori Akazaki

Electrical Engineering Sciences

Research output: Contribution to journal › Article

4 Citations (Scopus)

Abstract

The electron velocity distribution function is the key parameter for understanding chemical kinetics in plasmas of discharge-pumped excimer lasers. Local and unambiguous determination of the parameter is presently only possible by the Thomson scattering, and this letter describes the first observation of the Thomson scattering signals from ruby laser light from an excimer laser. The results revealed otherwise inaccessible structure of the electron temperature, such as an increase of the temperature when the buffer gas was changed from helium to neon.

Original language	English
Pages (from-to)	L1589-L1591
Journal	Japanese Journal of Applied Physics
Volume	28
Issue number	9 A
DOIs	https://doi.org/10.1143/JJAP.28.L1589
Publication status	Published - Sep 1 1989

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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Yamakoshi, H., Kato, M., Uchino, K., Iwata, T., Masuda, M., Muraoka, K., Maeda, M., & Akazaki, M. (1989). Thomson scattering diagnostics of a discharge-pumped excimer laser. Japanese Journal of Applied Physics, 28(9 A), L1589-L1591. https://doi.org/10.1143/JJAP.28.L1589

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AU - Uchino, Kiichiro

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AU - Masuda, Mitsuharu

AU - Muraoka, Katsunori

AU - Maeda, Mitsuo

AU - Akazaki, Masanori

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