Thomson scattering diagnostics of discharge plasmas in an excimer laser

H. Yamakoshi, M. Kato, Y. Kubo, H. Enokizono, K. Uchino, K. Muraoka, A. Takahashi, M. Maeda

Research output: Contribution to journalConference article

Abstract

The electron-velocity distribution function of the discharge plasma in a rare gas halide excimer laser was diagnosed by the Thomson scattering method. The measured electron-velocity distribution function shows that the predicted value by the calculation is accurate. Those results assure that the calculation method which is based on the kinetic calculation using the circuit equations, the Boltzmann equation and the rate equations is effective in the excimer laser simulation.

Original languageEnglish
Pages (from-to)119-122
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1397
Issue numberpt 1
Publication statusPublished - Jan 1 1991
Externally publishedYes
Event8th International Symposium on Gas Flow and Chemical Lasers Part 1 (of 2) - Madrid, Spain
Duration: Sep 10 1990Sep 14 1990

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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