TY - JOUR
T1 - Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases
AU - Narishige, Soushi
AU - Kitamura, Shuichi
AU - Sakemi, Shuuji
AU - Tomita, Kentaro
AU - Uchino, Kiichiro
AU - Muraoka, Katsunori
AU - Sakoda, Tadanori
PY - 2002/11/1
Y1 - 2002/11/1
N2 - In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.
AB - In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.
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U2 - 10.1143/jjap.41.l1259
DO - 10.1143/jjap.41.l1259
M3 - Letter
AN - SCOPUS:0036868616
VL - 41
SP - L1259-L1262
JO - Japanese Journal of Applied Physics, Part 2: Letters
JF - Japanese Journal of Applied Physics, Part 2: Letters
SN - 0021-4922
IS - 11 A
ER -