Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

Soushi Narishige, Shuichi Kitamura, Shuuji Sakemi, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda

Research output: Contribution to journalLetter

3 Citations (Scopus)

Abstract

In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H2/CH4 gas mixture at a moderate pressure were successfully measured for the first time.

Original languageEnglish
Pages (from-to)L1259-L1262
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume41
Issue number11 A
DOIs
Publication statusPublished - Nov 1 2002

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

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