Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

Soushi Narishige; Shuichi Kitamura; Shuuji Sakemi; Kentaro Tomita; Kiichiro Uchino; Katsunori Muraoka; Tadanori Sakoda

doi:10.1143/jjap.41.l1259

Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases

Soushi Narishige, Shuichi Kitamura, Shuuji Sakemi, Kentaro Tomita, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda

Electrical Engineering Sciences

Research output: Contribution to journal › Letter

3 Citations (Scopus)

Abstract

In Thomson scattering measurements of processing plasmas, rotational Raman scattering light from molecules sometimes overlaps the observed spectra. In order to solve this problem, a new method is proposed. This method involves separating the Thomson scattering component from the Raman scattering component by utilizing differences in the scattering characteristics depending on scattering wavelength and scattering geometry. By using this method, electron densities and electron temperatures of a microwave discharge plasma produced in a H₂/CH₄ gas mixture at a moderate pressure were successfully measured for the first time.

Original language	English
Pages (from-to)	L1259-L1262
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	41
Issue number	11 A
DOIs	https://doi.org/10.1143/jjap.41.l1259
Publication status	Published - Nov 1 2002

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/jjap.41.l1259

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Narishige, S., Kitamura, S., Sakemi, S., Tomita, K., Uchino, K., Muraoka, K., & Sakoda, T. (2002). Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases. Japanese Journal of Applied Physics, Part 2: Letters, 41(11 A), L1259-L1262. https://doi.org/10.1143/jjap.41.l1259

Thomson scattering diagnostics of glow discharge plasmas produced in Raman active gases. / Narishige, Soushi; Kitamura, Shuichi; Sakemi, Shuuji; Tomita, Kentaro ; Uchino, Kiichiro; Muraoka, Katsunori; Sakoda, Tadanori.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 41, No. 11 A, 01.11.2002, p. L1259-L1262.

Research output: Contribution to journal › Letter

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AU - Sakemi, Shuuji

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AU - Uchino, Kiichiro

AU - Muraoka, Katsunori

AU - Sakoda, Tadanori

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