Thomson scattering measurement of electron density and temperature of a microwave plasma produced in a hydrogen gas at a moderate pressure

Soushi Narishige, Seiji Suzuki, Mark D. Bowden, Kiichiro Uchino, Katsunori Muraoka, Tadanori Sakoda, Won Zoo Park

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Laser Thomson scattering was applied successfully for the first time to a microwave discharge plasma suitable for deposition of diamond thin film. The plasma was produced in pure hydrogen gas, but the conditions were otherwise identical to those used for diamond deposition. The local electron density and temperature at the plasma center were (3.0 ± 0.2) × 1017 m-3 and (1.7 plusmn; 0.2) eV. Although the degree of ionization of the plasma was very low (<10-6), Thomson scattering signals could be detected clearly by using a double-monochromator which has a stray light rejection of 10-6 at the differential wavelength of Δλ = 1 nm from the laser wavelength. Various checks were made to exclude the possibility of the probing laser from affecting the measured values, confirming the reliability of the measurement. γ 2000 The Japan Society of Applied Physics.

Original languageEnglish
Pages (from-to)6732-6736
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume39
Issue number12 A
Publication statusPublished - Dec 1 2000

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Thomson scattering
Electron temperature
Carrier concentration
Microwaves
Scattering
electron energy
Plasmas
microwaves
Hydrogen
hydrogen
diamonds
Gases
gases
lasers
Lasers
Stray light
monochromators
wavelengths
rejection
Wavelength

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Thomson scattering measurement of electron density and temperature of a microwave plasma produced in a hydrogen gas at a moderate pressure. / Narishige, Soushi; Suzuki, Seiji; Bowden, Mark D.; Uchino, Kiichiro; Muraoka, Katsunori; Sakoda, Tadanori; Park, Won Zoo.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, Vol. 39, No. 12 A, 01.12.2000, p. 6732-6736.

Research output: Contribution to journalArticle

Narishige, Soushi ; Suzuki, Seiji ; Bowden, Mark D. ; Uchino, Kiichiro ; Muraoka, Katsunori ; Sakoda, Tadanori ; Park, Won Zoo. / Thomson scattering measurement of electron density and temperature of a microwave plasma produced in a hydrogen gas at a moderate pressure. In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 2000 ; Vol. 39, No. 12 A. pp. 6732-6736.
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