Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma

M. D. Bowden, T. Okamoto, F. Kimura, H. Muta, Kiichiro Uchino, K. Muraoka, T. Sakoda, M. Maeda, Y. Manabe, M. Kitagawa, T. Kimura

Research output: Contribution to journalArticle

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Abstract

Electron temperature Te and density ne in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of 1-5 eV and densities in the range of 2-10×1017 m -3 were measured. Te and ne were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.

Original languageEnglish
Pages (from-to)2732-2738
Number of pages7
JournalJournal of Applied Physics
Volume73
Issue number6
DOIs
Publication statusPublished - Dec 1 1993

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Thomson scattering
electron cyclotron resonance
electron energy
velocity distribution
incoherent scattering
magnetic fields
yttrium-aluminum garnet
low pressure
fusion
argon
deviation
microwaves
anisotropy
lasers
temperature

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma. / Bowden, M. D.; Okamoto, T.; Kimura, F.; Muta, H.; Uchino, Kiichiro; Muraoka, K.; Sakoda, T.; Maeda, M.; Manabe, Y.; Kitagawa, M.; Kimura, T.

In: Journal of Applied Physics, Vol. 73, No. 6, 01.12.1993, p. 2732-2738.

Research output: Contribution to journalArticle

Bowden, MD, Okamoto, T, Kimura, F, Muta, H, Uchino, K, Muraoka, K, Sakoda, T, Maeda, M, Manabe, Y, Kitagawa, M & Kimura, T 1993, 'Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma', Journal of Applied Physics, vol. 73, no. 6, pp. 2732-2738. https://doi.org/10.1063/1.353046
Bowden, M. D. ; Okamoto, T. ; Kimura, F. ; Muta, H. ; Uchino, Kiichiro ; Muraoka, K. ; Sakoda, T. ; Maeda, M. ; Manabe, Y. ; Kitagawa, M. ; Kimura, T. / Thomson scattering measurements of electron temperature and density in an electron cyclotron resonance plasma. In: Journal of Applied Physics. 1993 ; Vol. 73, No. 6. pp. 2732-2738.
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AU - Bowden, M. D.

AU - Okamoto, T.

AU - Kimura, F.

AU - Muta, H.

AU - Uchino, Kiichiro

AU - Muraoka, K.

AU - Sakoda, T.

AU - Maeda, M.

AU - Manabe, Y.

AU - Kitagawa, M.

AU - Kimura, T.

PY - 1993/12/1

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N2 - Electron temperature Te and density ne in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of 1-5 eV and densities in the range of 2-10×1017 m -3 were measured. Te and ne were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.

AB - Electron temperature Te and density ne in the source region of an electron cyclotron resonance discharge have been measured by incoherent Thomson scattering of the beam from a 0.5 J yttrium aluminum garnet laser. This is the first experiment in which this technique, routinely used on fusion plasmas, has been applied to a processing plasma. Measurements were made in an argon discharge at pressures from 0.3 to 2 mTorr and microwave powers from 250 to 1000 W. Velocity distributions were measured both parallel and perpendicular to the magnetic field and a slight anisotropy of electron temperature was observed for low-pressure discharges. Temperatures in the range of 1-5 eV and densities in the range of 2-10×1017 m -3 were measured. Te and ne were found to strongly depend on pressure but only weakly on the input power and discharge magnetic field. No deviations from a Maxwellian velocity distribution were observed.

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