Abstract
We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
| Original language | English |
|---|---|
| Title of host publication | International Conference on Lasers, Applications, and Technologies 2007 |
| Subtitle of host publication | Laser-assisted Micro- and Nanotechnologies |
| DOIs | |
| Publication status | Published - Nov 26 2007 |
| Event | International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus Duration: May 28 2007 → Jun 1 2007 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 6732 |
| ISSN (Print) | 0277-786X |
Other
| Other | International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies |
|---|---|
| Country | Belarus |
| City | Minsk |
| Period | 5/28/07 → 6/1/07 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Cite this
Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Satoru, Tanaka; Misawa, Hiroaki.
International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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TY - GEN
T1 - Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
AU - Juodkazis, Saulius
AU - Nishimura, Koichi
AU - Okuno, Hiroki
AU - Tabuchi, Yusuke
AU - Matsuo, Shigeki
AU - Satoru, Tanaka
AU - Misawa, Hiroaki
PY - 2007/11/26
Y1 - 2007/11/26
N2 - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
AB - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
UR - http://www.scopus.com/inward/record.url?scp=36248975205&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=36248975205&partnerID=8YFLogxK
U2 - 10.1117/12.751889
DO - 10.1117/12.751889
M3 - Conference contribution
SN - 0819468908
SN - 9780819468901
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - International Conference on Lasers, Applications, and Technologies 2007
ER -