TY - GEN
T1 - Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics
AU - Juodkazis, Saulius
AU - Nishimura, Koichi
AU - Okuno, Hiroki
AU - Tabuchi, Yusuke
AU - Matsuo, Shigeki
AU - Tanaka, Satoru
AU - Misawa, Hiroaki
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2007
Y1 - 2007
N2 - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
AB - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.
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U2 - 10.1117/12.751889
DO - 10.1117/12.751889
M3 - Conference contribution
AN - SCOPUS:36248975205
SN - 0819468908
SN - 9780819468901
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - International Conference on Lasers, Applications, and Technologies 2007
T2 - International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
Y2 - 28 May 2007 through 1 June 2007
ER -