Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis; Koichi Nishimura; Hiroki Okuno; Yusuke Tabuchi; Shigeki Matsuo; Satoru Tanaka; Hiroaki Misawa

doi:10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original language	English
Title of host publication	International Conference on Lasers, Applications, and Technologies 2007
Subtitle of host publication	Laser-assisted Micro- and Nanotechnologies
DOIs	https://doi.org/10.1117/12.751889
Publication status	Published - 2007
Event	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus Duration: May 28 2007 → Jun 1 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6732
ISSN (Print)	0277-786X

Other

Other	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
Country	Belarus
City	Minsk
Period	5/28/07 → 6/1/07

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.751889

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Cite this

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732). https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Tanaka, Satoru; Misawa, Hiroaki.

International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Tanaka, S & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. in International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies., 67320B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, Belarus, 5/28/07. https://doi.org/10.1117/12.751889

Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Tanaka S et al. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.751889

Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Tanaka, Satoru ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).

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AB - We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

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