Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis; Koichi Nishimura; Hiroki Okuno; Yusuke Tabuchi; Shigeki Matsuo; Satoru Tanaka; Hiroaki Misawa

doi:10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original language	English
Title of host publication	International Conference on Lasers, Applications, and Technologies 2007
Subtitle of host publication	Laser-assisted Micro- and Nanotechnologies
DOIs	https://doi.org/10.1117/12.751889
Publication status	Published - Nov 26 2007
Event	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus Duration: May 28 2007 → Jun 1 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6732
ISSN (Print)	0277-786X

Other

Other	International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
Country	Belarus
City	Minsk
Period	5/28/07 → 6/1/07

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732). https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Tanaka, Satoru; Misawa, Hiroaki.

International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Tanaka, S & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. in International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies., 67320B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, Belarus, 5/28/07. https://doi.org/10.1117/12.751889

Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Tanaka S et al. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.751889

Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Tanaka, Satoru ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).

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Access to Document

10.1117/12.751889