Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Satoru Tanaka, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original languageEnglish
Title of host publicationInternational Conference on Lasers, Applications, and Technologies 2007
Subtitle of host publicationLaser-assisted Micro- and Nanotechnologies
DOIs
Publication statusPublished - Nov 26 2007
EventInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
Duration: May 28 2007Jun 1 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6732
ISSN (Print)0277-786X

Other

OtherInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
CountryBelarus
CityMinsk
Period5/28/076/1/07

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Tanaka, S., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732). https://doi.org/10.1117/12.751889