Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics

Saulius Juodkazis, Koichi Nishimura, Hiroki Okuno, Yusuke Tabuchi, Shigeki Matsuo, Tanaka Satoru, Hiroaki Misawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

We demonstrate three - dimensional (3D) structuring of materials by femtosecond laser irradiation. The self-organized ordered formation of ripples by a laser raster-scanning on the surface of 4H-SiC is demonstrated. This method is scalable up to areas with sum-millimeter cross-sections. The role of ripple-like structures in the case of the surface and in-bulk micro-structuring of different materials is discussed. The field enhancement effects at the nano-structured surfaces and their role in ripple formation are estimated.

Original languageEnglish
Title of host publicationInternational Conference on Lasers, Applications, and Technologies 2007
Subtitle of host publicationLaser-assisted Micro- and Nanotechnologies
DOIs
Publication statusPublished - Nov 26 2007
EventInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies - Minsk, Belarus
Duration: May 28 2007Jun 1 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6732
ISSN (Print)0277-786X

Other

OtherInternational Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies
CountryBelarus
CityMinsk
Period5/28/076/1/07

Fingerprint

Microfabrication
Ripple
ripples
Semiconductors
Metals
Semiconductor materials
Laser
Three-dimensional
Lasers
metals
raster scanning
lasers
Femtosecond Laser
Laser Scanning
Laser beam effects
Ultrashort pulses
Irradiation
Cross section
Enhancement
Scanning

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Juodkazis, S., Nishimura, K., Okuno, H., Tabuchi, Y., Matsuo, S., Satoru, T., & Misawa, H. (2007). Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies [67320B] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732). https://doi.org/10.1117/12.751889

Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. / Juodkazis, Saulius; Nishimura, Koichi; Okuno, Hiroki; Tabuchi, Yusuke; Matsuo, Shigeki; Satoru, Tanaka; Misawa, Hiroaki.

International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6732).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Juodkazis, S, Nishimura, K, Okuno, H, Tabuchi, Y, Matsuo, S, Satoru, T & Misawa, H 2007, Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. in International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies., 67320B, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6732, International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies, Minsk, Belarus, 5/28/07. https://doi.org/10.1117/12.751889
Juodkazis S, Nishimura K, Okuno H, Tabuchi Y, Matsuo S, Satoru T et al. Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. In International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. 67320B. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.751889
Juodkazis, Saulius ; Nishimura, Koichi ; Okuno, Hiroki ; Tabuchi, Yusuke ; Matsuo, Shigeki ; Satoru, Tanaka ; Misawa, Hiroaki. / Three-dimensional laser microfabrication of metals, semiconductors, and dielectrics. International Conference on Lasers, Applications, and Technologies 2007: Laser-assisted Micro- and Nanotechnologies. 2007. (Proceedings of SPIE - The International Society for Optical Engineering).
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