Tight-binding quantum chemical molecular dynamics simulation of mechano-chemical reactions during chemical-mechanical polishing process of SiO 2 surface by CeO 2 particle

Arivazhagan Rajendran, Yasufumi Takahashi, Michihisa Koyama, Momoji Kubo, Akira Miyamoto

    Research output: Contribution to journalConference articlepeer-review

    65 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Tight-binding quantum chemical molecular dynamics simulation of mechano-chemical reactions during chemical-mechanical polishing process of SiO <sub>2</sub> surface by CeO <sub>2</sub> particle'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science

    Physics & Astronomy