Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.
|Number of pages||5|
|Journal||Journal of Applied Physics|
|Issue number||10 1|
|Publication status||Published - May 15 2003|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)