Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Kungen Teii, Michinobu Mizumura, Shousaka Matsumura, Shinriki Teii

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Abstract

Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.

Original languageEnglish
Pages (from-to)5888-5892
Number of pages5
JournalJournal of Applied Physics
Volume93
Issue number10 1
DOIs
Publication statusPublished - May 15 2003

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All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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