Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Kungen Teii; Michinobu Mizumura; Shousaka Matsumura; Shinriki Teii

doi:10.1063/1.1568158

Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Kungen Teii, Michinobu Mizumura, Shousaka Matsumura, Shinriki Teii

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO₂ laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.

Original language	English
Pages (from-to)	5888-5892
Number of pages	5
Journal	Journal of Applied Physics
Volume	93
Issue number	10 1
DOIs	https://doi.org/10.1063/1.1568158
Publication status	Published - May 15 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

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10.1063/1.1568158

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@article{bb0aa10d672e4bcab6f23a43e98c8e39,

title = "Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma",

abstract = "Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.",

author = "Kungen Teii and Michinobu Mizumura and Shousaka Matsumura and Shinriki Teii",

year = "2003",

month = may,

day = "15",

doi = "10.1063/1.1568158",

language = "English",

volume = "93",

pages = "5888--5892",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "10 1",

}

TY - JOUR

T1 - Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

AU - Teii, Kungen

AU - Mizumura, Michinobu

AU - Matsumura, Shousaka

AU - Teii, Shinriki

PY - 2003/5/15

Y1 - 2003/5/15

N2 - Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.

AB - Time- and space-resolved electric potentials were investigated in a parallel-plate radio-frequency plasma. To investigate the electric potentials a low-input capacitance emissive probe heated by a CO2 laser was used. The analysis showed that the electric field in the cathode sheath region obtained by the probe method was in agreement with that by the laser optogalvanic spectroscopy.

UR - http://www.scopus.com/inward/record.url?scp=0038312137&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038312137&partnerID=8YFLogxK

U2 - 10.1063/1.1568158

DO - 10.1063/1.1568158

M3 - Article

AN - SCOPUS:0038312137

SN - 0021-8979

VL - 93

SP - 5888

EP - 5892

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10 1

ER -

Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Abstract

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