Time-resolved spectroscopic observation of deposition processes of ultrananocrystalline diamond/amorphous carbon composite films by using a coaxial arc plasma gun

Kenji Hanada, Tsuyoshi Yoshitake, Takashi Nishiyama, Kunihito Nagayama

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23 Citations (Scopus)

Abstract

The deposition of ultrananocrystalline diamond (UNCD)/amorphous carbon composite films using a coaxial arc plasma gun in vacuum and, for comparison, in a 53.3 Pa hydrogen atmosphere was spectroscopically observed using a high-speed camera equipped with narrow-band-pass filters. UNCD crystallites with diameters of approximately 1.6nm were formed even in vacuum. These extremely small crystallites imply that the formation is predominantly due to nucleation without the subsequent growth. Even in vacuum, emissions from C+ ions, C atoms, and C2 dimers lasted for approximately 100 μs, although the emission lifetimes of these species are generally 10 ns. We consider that the nucleation is due to the supersaturated environment containing excited carbon species with large number densities.

Original languageEnglish
Article number08JF09
JournalJapanese journal of applied physics
Volume49
Issue number8 PART 2
DOIs
Publication statusPublished - Aug 2010

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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