TiO2/TiN/TiO2 heat mirrors by laser ablation of single TiN target

H. Kawasaki, T. Ohshima, Y. Yagyu, Y. Suda, S. I. Khartsev, A. M. Grishin

Research output: Contribution to journalConference articlepeer-review


Titanium oxide (TiO2) and titanium nitride (TiN) multilayered films grown by pulsed laser deposition (PLD) technique have been tested as a heat mirror, which have a high transmittance in the visible region and a high reflectance in the infrared. Three layer TiO2/TiN/TiO2 heat mirrors were grown on Corning glass substrates ablating single TiN target. Switching of TiO2-to-TiN layers composition was achieved by changing gas atmosphere (oxygen-to-nitrogen). Grown TiO2/TiN/TiO2 heat mirrors are highly transparent in visible (above 60% at 525nm), opaque in infrared (10% at 2600nm) and in the range from 400 nm to 2600 nm they possess almost the same properties as films prepared using two targets: TiO2 and TiN. XPS confirms similarity of chemical composition of multilayered TiO2/TiN films prepared by single TiN and two TiO2 and TiN targets techniques. Furthermore, multifunctional self cleaning properties of TiO2/TiN heat mirrors are expected through the precise control of the composition of the top TiO2 layer operating as a photocatalyst.

Original languageEnglish
Article number012038
JournalJournal of Physics: Conference Series
Issue numberPart 1
Publication statusPublished - Mar 27 2008
Externally publishedYes
Event17th International Vacuum Congress, IVC 2007, 13th International Conference on Surface Science, ICSS 2007 and International Conference on Nanoscience and Technology, ICN+T 2007 - Stockholm, Sweden
Duration: Jul 2 2007Jul 6 2007

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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