Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

Original languageEnglish
Title of host publication2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages200-204
Number of pages5
ISBN (Electronic)9781467367523
DOIs
Publication statusPublished - Jan 1 2014
Event2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States
Duration: Nov 5 2014Nov 7 2014

Other

Other2014 International Symposium on Optomechatronic Technologies, ISOT 2014
CountryUnited States
CitySeattle
Period11/5/1411/7/14

Fingerprint

Surface topography
Scattering
Light scattering
Platinum
Lenses
Glass
Defects

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Takaya, Y., Michihata, M., & Hayashi, T. (2014). Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. In 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 (pp. 200-204). [7119419] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISOT.2014.55

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.

2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takaya, Y, Michihata, M & Hayashi, T 2014, Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. in 2014 International Symposium on Optomechatronic Technologies, ISOT 2014., 7119419, Institute of Electrical and Electronics Engineers Inc., pp. 200-204, 2014 International Symposium on Optomechatronic Technologies, ISOT 2014, Seattle, United States, 11/5/14. https://doi.org/10.1109/ISOT.2014.55
Takaya Y, Michihata M, Hayashi T. Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. In 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc. 2014. p. 200-204. 7119419 https://doi.org/10.1109/ISOT.2014.55
Takaya, Yasuhiro ; Michihata, Masaki ; Hayashi, Terutake. / Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. 2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 200-204
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