Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya; Masaki Michihata; Terutake Hayashi

doi:10.1109/ISOT.2014.55

Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

Manufacturing Process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

Original language	English
Title of host publication	2014 International Symposium on Optomechatronic Technologies, ISOT 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	200-204
Number of pages	5
ISBN (Electronic)	9781467367523
DOIs	https://doi.org/10.1109/ISOT.2014.55
Publication status	Published - Jan 1 2014
Event	2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States Duration: Nov 5 2014 → Nov 7 2014

Other

Other	2014 International Symposium on Optomechatronic Technologies, ISOT 2014
Country	United States
City	Seattle
Period	11/5/14 → 11/7/14

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/ISOT.2014.55

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Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.

2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takaya, Y, Michihata, M & Hayashi, T 2014, Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. in 2014 International Symposium on Optomechatronic Technologies, ISOT 2014., 7119419, Institute of Electrical and Electronics Engineers Inc., pp. 200-204, 2014 International Symposium on Optomechatronic Technologies, ISOT 2014, Seattle, United States, 11/5/14. https://doi.org/10.1109/ISOT.2014.55

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