Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.

Original languageEnglish
Title of host publication2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages200-204
Number of pages5
ISBN (Electronic)9781467367523
DOIs
Publication statusPublished - Jan 1 2014
Event2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States
Duration: Nov 5 2014Nov 7 2014

Other

Other2014 International Symposium on Optomechatronic Technologies, ISOT 2014
Country/TerritoryUnited States
CitySeattle
Period11/5/1411/7/14

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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