Abstract
In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
Original language | English |
---|---|
Title of host publication | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 200-204 |
Number of pages | 5 |
ISBN (Electronic) | 9781467367523 |
DOIs | |
Publication status | Published - Jan 1 2014 |
Event | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States Duration: Nov 5 2014 → Nov 7 2014 |
Other
Other | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
---|---|
Country | United States |
City | Seattle |
Period | 11/5/14 → 11/7/14 |
All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering