Abstract
In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
| Original language | English |
|---|---|
| Title of host publication | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 200-204 |
| Number of pages | 5 |
| ISBN (Electronic) | 9781467367523 |
| DOIs | |
| Publication status | Published - Jan 1 2014 |
| Event | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, United States Duration: Nov 5 2014 → Nov 7 2014 |
Other
| Other | 2014 International Symposium on Optomechatronic Technologies, ISOT 2014 |
|---|---|
| Country | United States |
| City | Seattle |
| Period | 11/5/14 → 11/7/14 |
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All Science Journal Classification (ASJC) codes
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography. / Takaya, Yasuhiro; Michihata, Masaki; Hayashi, Terutake.
2014 International Symposium on Optomechatronic Technologies, ISOT 2014. Institute of Electrical and Electronics Engineers Inc., 2014. p. 200-204 7119419.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Total Angle Resolved Scattering Characterization for Ultra-fine Finished Surface Areal-Topography
AU - Takaya, Yasuhiro
AU - Michihata, Masaki
AU - Hayashi, Terutake
PY - 2014/1/1
Y1 - 2014/1/1
N2 - In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
AB - In this study, the total angle resolved scattering (T-ARS) based on the light scattering method is suggested. To characterize surface areal-topography with nano-defects using the T-ARS method we have developed an automated 3D-scattering measurement system that enables to detect the scattered light from a super-smooth surface in total directions. In order to verify the feasibility of the T-ARS method, the analysis of surface areal-topography based on 3D light scattering measurement is performed using a platinum-coated glass lens mold with an ultra-fine finished surface.
UR - http://www.scopus.com/inward/record.url?scp=84988289859&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84988289859&partnerID=8YFLogxK
U2 - 10.1109/ISOT.2014.55
DO - 10.1109/ISOT.2014.55
M3 - Conference contribution
AN - SCOPUS:84988289859
SP - 200
EP - 204
BT - 2014 International Symposium on Optomechatronic Technologies, ISOT 2014
PB - Institute of Electrical and Electronics Engineers Inc.
ER -