Total angle-resolved scattering: Characterization of microlens mold surface

T. Hayashi; M. Michihata; Y. Takaya

doi:10.1016/j.proeng.2011.11.091

Total angle-resolved scattering: Characterization of microlens mold surface

T. Hayashi, M. Michihata, Y. Takaya

Research output: Contribution to journal › Conference article › peer-review

4 Citations (Scopus)

Abstract

It is difficult to quantitatively determine the surface condition of the lens mold in the lens fabrication process. In this study, we develop an automated light scattering measurement system, which enables the scattered light pattern from the lens mold to be distinguished using angle-resolved scattering with an intensity pattern matching method. It is found that various defects on the lens mold can categorize and determine their surface-specific parameters. Both the scattering angle and scattering intensity distribution is analyzed, and the scattering pattern is categorized by pattern matching for specific shapes such as fan, line, and diffraction patterns.

Original language	English
Pages (from-to)	132-137
Number of pages	6
Journal	Procedia Engineering
Volume	19
DOIs	https://doi.org/10.1016/j.proeng.2011.11.091
Publication status	Published - 2011
Externally published	Yes
Event	1st CIRP Conference on Surface Integrity, CSI 2012 - Bremen, Germany Duration: Jan 30 2012 → Feb 1 2012

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1016/j.proeng.2011.11.091

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title = "Total angle-resolved scattering: Characterization of microlens mold surface",

abstract = "It is difficult to quantitatively determine the surface condition of the lens mold in the lens fabrication process. In this study, we develop an automated light scattering measurement system, which enables the scattered light pattern from the lens mold to be distinguished using angle-resolved scattering with an intensity pattern matching method. It is found that various defects on the lens mold can categorize and determine their surface-specific parameters. Both the scattering angle and scattering intensity distribution is analyzed, and the scattering pattern is categorized by pattern matching for specific shapes such as fan, line, and diffraction patterns.",

author = "T. Hayashi and M. Michihata and Y. Takaya",

year = "2011",

doi = "10.1016/j.proeng.2011.11.091",

language = "English",

volume = "19",

pages = "132--137",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier BV",

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TY - JOUR

T1 - Total angle-resolved scattering

T2 - 1st CIRP Conference on Surface Integrity, CSI 2012

AU - Hayashi, T.

AU - Michihata, M.

AU - Takaya, Y.

PY - 2011

Y1 - 2011

N2 - It is difficult to quantitatively determine the surface condition of the lens mold in the lens fabrication process. In this study, we develop an automated light scattering measurement system, which enables the scattered light pattern from the lens mold to be distinguished using angle-resolved scattering with an intensity pattern matching method. It is found that various defects on the lens mold can categorize and determine their surface-specific parameters. Both the scattering angle and scattering intensity distribution is analyzed, and the scattering pattern is categorized by pattern matching for specific shapes such as fan, line, and diffraction patterns.

AB - It is difficult to quantitatively determine the surface condition of the lens mold in the lens fabrication process. In this study, we develop an automated light scattering measurement system, which enables the scattered light pattern from the lens mold to be distinguished using angle-resolved scattering with an intensity pattern matching method. It is found that various defects on the lens mold can categorize and determine their surface-specific parameters. Both the scattering angle and scattering intensity distribution is analyzed, and the scattering pattern is categorized by pattern matching for specific shapes such as fan, line, and diffraction patterns.

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U2 - 10.1016/j.proeng.2011.11.091

DO - 10.1016/j.proeng.2011.11.091

M3 - Conference article

AN - SCOPUS:83755178087

SN - 1877-7058

VL - 19

SP - 132

EP - 137

JO - Procedia Engineering

JF - Procedia Engineering

Y2 - 30 January 2012 through 1 February 2012

ER -

Total angle-resolved scattering: Characterization of microlens mold surface

Abstract

All Science Journal Classification (ASJC) codes

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