Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy

Daisuke Nakamura; Takayuki Takao; Yuji Oki; Mitsuo Maeda

doi:10.1109/CLEOPR.2003.1277028

Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy

Daisuke Nakamura, Takayuki Takao, Yuji Oki, Mitsuo Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277028
Publication status	Published - Jan 1 2003
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan, Province of China Duration: Dec 15 2003 → Dec 19 2003

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Other

Other	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan, Province of China
City	Taipei
Period	12/15/03 → 12/19/03

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2003.1277028

Cite this

Nakamura, D., Takao, T., Oki, Y., & Maeda, M. (2003). Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings [1277028] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277028

Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy. / Nakamura, Daisuke; Takao, Takayuki; Oki, Yuji et al.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. 1277028 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakamura, D, Takao, T, Oki, Y & Maeda, M 2003, Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277028, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, Province of China, 12/15/03. https://doi.org/10.1109/CLEOPR.2003.1277028

Nakamura D, Takao T, Oki Y, Maeda M. Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. 1277028. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277028

Nakamura, Daisuke ; Takao, Takayuki ; Oki, Yuji et al. / Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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abstract = "A nanometer-scaled layer removal of a surface of poly-methylmethacrylate was attained by a single laser shot from a pulsed excimer laser ablation. The combination of the removal and laser fluorescence spectroscopy demonstrated a nanometer-scaled element analysis on a solid surface.",

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Trace element analysis of nanometer-scaled solid state surface by laser ablation atomic fluorescence spectroscopy

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