Transient reflecting grating for sub-surface analysis: GHz ultrasonic and thermal spectroscopies and imaging

T. Sawada, Akira Harata

Research output: Contribution to journalArticle

19 Citations (Scopus)

Abstract

Picosecond time-resolved Transient Reflecting Grating (TRG) measurements are demonstrated for GHz ultrasonic and thermal spectroscopies of thin films and sub-surface regions of sub-μm scale. The measurements should be tools for electrochemical interface monitoring and time-resolved imaging. Some results are presented to show ion-implantation-induced surface hardening and unusual heat-diffusion behavior near a silicon surface. A model describing potential dependence of TRG responses at an electrochemical interface is proposed. An image of photoexcited carrier density is compared with a thermal image for a He-ion-implanted silicon wafer to demonstrate the time-resolved imaging.

Original languageEnglish
Pages (from-to)263-268
Number of pages6
JournalApplied Physics A Materials Science & Processing
Volume61
Issue number3
DOIs
Publication statusPublished - Sep 1 1995
Externally publishedYes

Fingerprint

ultrasonic spectroscopy
Surface analysis
Ultrasonics
Spectroscopy
gratings
Imaging techniques
spectroscopy
silicon
Silicon
Silicon wafers
Ion implantation
hardening
Carrier concentration
Hardening
ion implantation
wafers
Ions
Thin films
heat
Monitoring

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Materials Science(all)

Cite this

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