Transition edge X-ray sensors for industrial applications

K. Tanaka, T. Morooka, R. Fujimoto, Y. Ishisaki, Y. Takei, U. Morita, N. Iyomoto, T. Oshima, S. Nakayama, N. Yamasaki, M. Koyanagi, K. Mitsuda, T. Ohashi, K. Chinone

Research output: Contribution to journalArticlepeer-review


We present the performance of transition edge sensors (TES) using Au/Ti bilayer (operating temperature 113 mK) with fast decay time for industrial applications. The energy resolution was 9.2 eV for Mn Kα1 (designed value 3.5 eV) and the decay time 71 μs, yielding the count rate 2.3 kcps (count per sec). We found that the energy resolution was limited by excess noise. The excess noise increased in proportion to the inverse of TES resistance as decreasing the TES resistance from normal resistance. The source of excess noise might exist in the TES.

Original languageEnglish
Pages (from-to)1619-1620
Number of pages2
JournalPhysica B: Condensed Matter
Issue numberII
Publication statusPublished - May 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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