Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate

Noriyuki Kuwano, Daigo Norizumi, Tomohiro Fukuyama, Masaru Itakura

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

Original languageEnglish
Pages (from-to)86-87
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number1
DOIs
Publication statusPublished - Jan 2003

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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