Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate

Noriyuki Kuwano, Daigo Norizumi, Tomohiro Fukuyama, Masaru Itakura

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

Original languageEnglish
Pages (from-to)86-87
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume42
Issue number1
DOIs
Publication statusPublished - Jan 1 2003

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Electron diffraction
Sputtering
electron diffraction
sputtering
Substrates
Diffraction patterns
diffraction patterns
incidence
Diffraction
diffraction

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

@article{df837c4b20004b8980fd5f86dc24c13b,
title = "Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate",
abstract = "A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.",
author = "Noriyuki Kuwano and Daigo Norizumi and Tomohiro Fukuyama and Masaru Itakura",
year = "2003",
month = "1",
day = "1",
doi = "10.1143/JJAP.42.86",
language = "English",
volume = "42",
pages = "86--87",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "Institute of Physics",
number = "1",

}

TY - JOUR

T1 - Transmission electron diffraction analysis of crystallographic orientation of β-FeSi2 produced by sputtering on Si(001) substrate

AU - Kuwano, Noriyuki

AU - Norizumi, Daigo

AU - Fukuyama, Tomohiro

AU - Itakura, Masaru

PY - 2003/1/1

Y1 - 2003/1/1

N2 - A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

AB - A practical procedure to distinguish b- and c-axes of β-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using β-FeSi2 formed on a Si substrate. The TED patterns for β-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.

UR - http://www.scopus.com/inward/record.url?scp=0038682079&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0038682079&partnerID=8YFLogxK

U2 - 10.1143/JJAP.42.86

DO - 10.1143/JJAP.42.86

M3 - Article

VL - 42

SP - 86

EP - 87

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 1

ER -