Transport control of dust particles via the electrical asymmetry effect: Experiment, simulation and modelling

Shinya Iwashita, Edmund Schüngel, Julian Schulze, Peter Hartmann, Zoltán Donkó, Giichiro Uchida, Kazunori Koga, Masaharu Shiratani, Uwe Czarnetzki

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The control of the spatial distribution of micrometre-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically, dust particles in plasmas form a layer located at the sheath edge adjacent to the bottom electrode. Here, a method of manipulating this distribution by the application of a specific excitation waveform, i.e. two consecutive harmonics, is discussed. Tuning the phase angle θ between the two harmonics allows one to adjust the discharge symmetry via the electrical asymmetry effect (EAE). An adiabatic (continuous) phase shift leaves the dust particles at an equilibrium position close to the lower sheath edge. Their levitation can be correlated with the electric field profile. By applying an abrupt phase shift the dust particles are transported between both sheaths through the plasma bulk and partially reside at an equilibrium position close to the upper sheath edge. Hence, the potential profile in the bulk region is probed by the dust particles providing indirect information on plasma properties. The respective motion is understood by an analytical model, showing both the limitations and possible ways of optimizing this sheath-to-sheath transport. A classification of the transport depending on the change in the dc self-bias is provided, and the pressure dependence is discussed.

Original languageEnglish
Article number245202
JournalJournal of Physics D: Applied Physics
Volume46
Issue number24
DOIs
Publication statusPublished - Jun 19 2013

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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