Transport of nano-particles in capacitively coupled rf discharges without and with amplitude modulation of discharge voltage

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Abstract

Transport of nano-particles in rf discharges without and with an amplitude modulation (AM) of the discharge voltage has been examined using a two-dimensional laser-light-scattering method. During the discharging period, nano-particles are mainly generated in the plasma/sheath boundary region near the powered electrode. They move away from their generation region towards the upper grounded electrode after turning off discharges due to thermophoretic force. Using AM discharges, nano-particles can be transported, during the modulation period, from their generation region to the plasma/sheath boundary region near the upper grounded electrode. The transport time is at least six times shorter than that after turning off unmodulated discharges. Two key parameters for the fast transport using AM discharges are the discharge voltage and the period of the AM.

Original languageEnglish
Article numberS05
Pages (from-to)2267-2271
Number of pages5
JournalJournal of Physics D: Applied Physics
Volume40
Issue number8
DOIs
Publication statusPublished - Apr 21 2007

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Acoustics and Ultrasonics
  • Surfaces, Coatings and Films

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