Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi; Saburoh Satoh

doi:10.1109/TPS.2005.845003

Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi, Saburoh Satoh

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF₄. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF₄ (1%) and Ar (99%).

Original language	English
Pages (from-to)	274-275
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	33
Issue number	2 I
DOIs	https://doi.org/10.1109/TPS.2005.845003
Publication status	Published - Apr 1 2005
Externally published	Yes

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Condensed Matter Physics

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/TPS.2005.845003

Cite this

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abstract = "A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).",

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AU - Satoh, Saburoh

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AB - A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

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Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

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