Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi, Saburoh Satoh

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

Original languageEnglish
Pages (from-to)274-275
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
Publication statusPublished - Apr 1 2005

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electric corona
gas mixtures
fluorocarbons
atmospheric pressure
decomposition
gases
energy

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

Cite this

Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge. / Hayashi, Nobuya; Satoh, Saburoh.

In: IEEE Transactions on Plasma Science, Vol. 33, No. 2 I, 01.04.2005, p. 274-275.

Research output: Contribution to journalArticle

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