Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

Nobuya Hayashi, Saburoh Satoh

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4 Citations (Scopus)

Abstract

A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

Original languageEnglish
Pages (from-to)274-275
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume33
Issue number2 I
DOIs
Publication statusPublished - Apr 1 2005
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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