Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Nobuya Hayashi, Kazuhiro Yamamoto, Satoshi Ihara, Masaki Kamatani, Saburoh Satoh, Chobei Yamabe

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage VA-K of the main discharge gap and its steepness dVA-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

Original languageEnglish
Pages (from-to)5399-5403
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number8
Publication statusPublished - Aug 1 2002
Externally publishedYes

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Fluorocarbons
fluorocarbons
Plasmas
Discharge (fluid mechanics)
electric corona
Decomposition
decomposition
Dilution
Atmospheric pressure
dilution
atmospheric pressure
Electric potential
slopes
Gases
electric potential
gases

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge. / Hayashi, Nobuya; Yamamoto, Kazuhiro; Ihara, Satoshi; Kamatani, Masaki; Satoh, Saburoh; Yamabe, Chobei.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 8, 01.08.2002, p. 5399-5403.

Research output: Contribution to journalArticle

Hayashi, Nobuya ; Yamamoto, Kazuhiro ; Ihara, Satoshi ; Kamatani, Masaki ; Satoh, Saburoh ; Yamabe, Chobei. / Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2002 ; Vol. 41, No. 8. pp. 5399-5403.
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