Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

Nobuya Hayashi, Kazuhiro Yamamoto, Satoshi Ihara, Masaki Kamatani, Saburoh Satoh, Chobei Yamabe

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage VA-K of the main discharge gap and its steepness dVA-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

Original languageEnglish
Pages (from-to)5399-5403
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number8
DOIs
Publication statusPublished - Aug 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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