Tribology of self-lubricating SU-8 composites for MEMS applications

Prabakaran Saravanan, S. K. Sinha, Joichi Sugimura

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationHandbook of Polymer Tribology
PublisherWorld Scientific Publishing Co. Pte Ltd
Pages567-599
Number of pages33
ISBN (Electronic)9789813227798
ISBN (Print)9789813227781
DOIs
Publication statusPublished - Mar 7 2018

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Tribology
MEMS
Composite materials

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Saravanan, P., Sinha, S. K., & Sugimura, J. (2018). Tribology of self-lubricating SU-8 composites for MEMS applications. In Handbook of Polymer Tribology (pp. 567-599). World Scientific Publishing Co. Pte Ltd. https://doi.org/10.1142/9789813227798_0018

Tribology of self-lubricating SU-8 composites for MEMS applications. / Saravanan, Prabakaran; Sinha, S. K.; Sugimura, Joichi.

Handbook of Polymer Tribology. World Scientific Publishing Co. Pte Ltd, 2018. p. 567-599.

Research output: Chapter in Book/Report/Conference proceedingChapter

Saravanan, P, Sinha, SK & Sugimura, J 2018, Tribology of self-lubricating SU-8 composites for MEMS applications. in Handbook of Polymer Tribology. World Scientific Publishing Co. Pte Ltd, pp. 567-599. https://doi.org/10.1142/9789813227798_0018
Saravanan P, Sinha SK, Sugimura J. Tribology of self-lubricating SU-8 composites for MEMS applications. In Handbook of Polymer Tribology. World Scientific Publishing Co. Pte Ltd. 2018. p. 567-599 https://doi.org/10.1142/9789813227798_0018
Saravanan, Prabakaran ; Sinha, S. K. ; Sugimura, Joichi. / Tribology of self-lubricating SU-8 composites for MEMS applications. Handbook of Polymer Tribology. World Scientific Publishing Co. Pte Ltd, 2018. pp. 567-599
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