Tunable optical microscanner driven by piezoelectric actuator

Takeshi Kobayashi, Toshihiro Itoh, Renshi Sawada, Ryutaro Maeda

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

In this study, we developed a tunable piezoelectric optical microscanner. The characteristic of the present microscanner is that the Pb(Zr,Ti)O 3 film is formed on the torsion hinges of the scanner and the hinges act as a tuner themselves. DC voltage applied to the tuner varies the resonant frequency of the rotation of the mirror. A laser displacement meter measures the resonant frequencies to be 6457 Hz for no tuning and 6471 Hz for 15 V tuning. The resonant frequency with tuning between 0 and 15 V shows a hysteresis curve. Moreover, tuning between -15 and 15 V results in the butterfly curve of resonant frequency. The scanning angle under resonant actuation at 6457 Hz is decreased from 5.6 to 5.0° by applying a DC voltage of 15 V to the tuner. The result is in good agreement with the displacement of the edge of the mirror measured using the laser displacement meter.

Original languageEnglish
Pages (from-to)6429-6432
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number9 B
DOIs
Publication statusPublished - Sep 20 2007

Fingerprint

piezoelectric actuators
Piezoelectric actuators
resonant frequencies
Natural frequencies
Tuning
tuning
hinges
Hinges
Mirrors
direct current
mirrors
Lasers
Electric potential
electric potential
curves
actuation
Torsional stress
scanners
torsion
lasers

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Tunable optical microscanner driven by piezoelectric actuator. / Kobayashi, Takeshi; Itoh, Toshihiro; Sawada, Renshi; Maeda, Ryutaro.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 46, No. 9 B, 20.09.2007, p. 6429-6432.

Research output: Contribution to journalArticle

Kobayashi, Takeshi ; Itoh, Toshihiro ; Sawada, Renshi ; Maeda, Ryutaro. / Tunable optical microscanner driven by piezoelectric actuator. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2007 ; Vol. 46, No. 9 B. pp. 6429-6432.
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