Abstract
In this study, we developed a tunable piezoelectric optical microscanner. The characteristic of the present microscanner is that the Pb(Zr,Ti)O 3 film is formed on the torsion hinges of the scanner and the hinges act as a tuner themselves. DC voltage applied to the tuner varies the resonant frequency of the rotation of the mirror. A laser displacement meter measures the resonant frequencies to be 6457 Hz for no tuning and 6471 Hz for 15 V tuning. The resonant frequency with tuning between 0 and 15 V shows a hysteresis curve. Moreover, tuning between -15 and 15 V results in the butterfly curve of resonant frequency. The scanning angle under resonant actuation at 6457 Hz is decreased from 5.6 to 5.0° by applying a DC voltage of 15 V to the tuner. The result is in good agreement with the displacement of the edge of the mirror measured using the laser displacement meter.
| Original language | English |
|---|---|
| Pages (from-to) | 6429-6432 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 9 B |
| DOIs | |
| Publication status | Published - Sep 20 2007 |
All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)