Two axial shearing force measurement device with a micro displacement sensor

Kota Harisaki; Toshihiro Takeshita; Takuma Iwasaki; Hideyuki Ando; Koji Uemura; Eiji Higurashi; Renshi Sawada

doi:10.1109/OMN.2014.6924528

Two axial shearing force measurement device with a micro displacement sensor

Kota Harisaki, Toshihiro Takeshita, Takuma Iwasaki, Hideyuki Ando, Koji Uemura, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. Applying shearing force on the surface of the frame, the tilts occur on the ceiling of the frame. We can measure that tilts as a shearing force by micro displacement sensor and we obtained a linear signal response to applied biaxial shearing force. The range and sensitivity of the sensor depends on the material or thickness of the frame, therefore we can apply the sensor to various possible applications by changing its shape.

Original language	English
Title of host publication	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
Publisher	IEEE Computer Society
Pages	213-214
Number of pages	2
ISBN (Electronic)	9780992841423
DOIs	https://doi.org/10.1109/OMN.2014.6924528
Publication status	Published - Oct 14 2014
Event	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom Duration: Aug 17 2014 → Aug 21 2014

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Other

Other	2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country/Territory	United Kingdom
City	Glasgow
Period	8/17/14 → 8/21/14

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2014.6924528

Cite this

Harisaki, K., Takeshita, T., Iwasaki, T., Ando, H., Uemura, K., Higurashi, E., & Sawada, R. (2014). Two axial shearing force measurement device with a micro displacement sensor. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 213-214). [6924528] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924528

Two axial shearing force measurement device with a micro displacement sensor. / Harisaki, Kota; Takeshita, Toshihiro; Iwasaki, Takuma et al.

2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society, 2014. p. 213-214 6924528 (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Harisaki, K, Takeshita, T, Iwasaki, T, Ando, H, Uemura, K, Higurashi, E & Sawada, R 2014, Two axial shearing force measurement device with a micro displacement sensor. in 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings., 6924528, International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, pp. 213-214, 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014, Glasgow, United Kingdom, 8/17/14. https://doi.org/10.1109/OMN.2014.6924528

Harisaki K, Takeshita T, Iwasaki T, Ando H, Uemura K, Higurashi E et al. Two axial shearing force measurement device with a micro displacement sensor. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings. IEEE Computer Society. 2014. p. 213-214. 6924528. (International Conference on Optical MEMS and Nanophotonics). doi: 10.1109/OMN.2014.6924528

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AB - We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. Applying shearing force on the surface of the frame, the tilts occur on the ceiling of the frame. We can measure that tilts as a shearing force by micro displacement sensor and we obtained a linear signal response to applied biaxial shearing force. The range and sensitivity of the sensor depends on the material or thickness of the frame, therefore we can apply the sensor to various possible applications by changing its shape.

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Two axial shearing force measurement device with a micro displacement sensor

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