Two axial shearing force measurement device with a micro displacement sensor

Kota Harisaki, Toshihiro Takeshita, Takuma Iwasaki, Hideyuki Ando, Koji Uemura, Eiji Higurashi, Renshi Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. Applying shearing force on the surface of the frame, the tilts occur on the ceiling of the frame. We can measure that tilts as a shearing force by micro displacement sensor and we obtained a linear signal response to applied biaxial shearing force. The range and sensitivity of the sensor depends on the material or thickness of the frame, therefore we can apply the sensor to various possible applications by changing its shape.

Original languageEnglish
Title of host publication2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
PublisherIEEE Computer Society
Pages213-214
Number of pages2
ISBN (Electronic)9780992841423
DOIs
Publication statusPublished - Oct 14 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: Aug 17 2014Aug 21 2014

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Other

Other2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
CountryUnited Kingdom
CityGlasgow
Period8/17/148/21/14

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Harisaki, K., Takeshita, T., Iwasaki, T., Ando, H., Uemura, K., Higurashi, E., & Sawada, R. (2014). Two axial shearing force measurement device with a micro displacement sensor. In 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings (pp. 213-214). [6924528] (International Conference on Optical MEMS and Nanophotonics). IEEE Computer Society. https://doi.org/10.1109/OMN.2014.6924528