Abstract
A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.
| Original language | English |
|---|---|
| Article number | 07LD01 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 55 |
| Issue number | 7S2 |
| DOIs | |
| Publication status | Published - Jan 1 2016 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
Cite this
Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures. / Chen, Kuan Chen; Ogiwara, Kohei; Chiu, Kuo Feng; Su, Li Wen; Uchino, Kiichiro; Kawai, Yoshinobu.
In: Japanese Journal of Applied Physics, Vol. 55, No. 7S2, 07LD01, 01.01.2016.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures
AU - Chen, Kuan Chen
AU - Ogiwara, Kohei
AU - Chiu, Kuo Feng
AU - Su, Li Wen
AU - Uchino, Kiichiro
AU - Kawai, Yoshinobu
PY - 2016/1/1
Y1 - 2016/1/1
N2 - A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.
AB - A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.
UR - http://www.scopus.com/inward/record.url?scp=85012897927&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85012897927&partnerID=8YFLogxK
U2 - 10.7567/JJAP.55.07LD01
DO - 10.7567/JJAP.55.07LD01
M3 - Article
AN - SCOPUS:85012897927
VL - 55
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7S2
M1 - 07LD01
ER -