Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures

Kuan Chen Chen, Kohei Ogiwara, Kuo Feng Chiu, Li Wen Su, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.

Original languageEnglish
Article number07LD01
JournalJapanese Journal of Applied Physics
Volume55
Issue number7S2
DOIs
Publication statusPublished - Jan 1 2016

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Discharge (fluid mechanics)
gas pressure
Plasmas
Gases
simulation
Carrier concentration
profiles
Ions
ions

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures. / Chen, Kuan Chen; Ogiwara, Kohei; Chiu, Kuo Feng; Su, Li Wen; Uchino, Kiichiro; Kawai, Yoshinobu.

In: Japanese Journal of Applied Physics, Vol. 55, No. 7S2, 07LD01, 01.01.2016.

Research output: Contribution to journalArticle

Chen, Kuan Chen ; Ogiwara, Kohei ; Chiu, Kuo Feng ; Su, Li Wen ; Uchino, Kiichiro ; Kawai, Yoshinobu. / Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures. In: Japanese Journal of Applied Physics. 2016 ; Vol. 55, No. 7S2.
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