TY - JOUR
T1 - Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures
AU - Chen, Kuan Chen
AU - Ogiwara, Kohei
AU - Chiu, Kuo Feng
AU - Su, Li Wen
AU - Uchino, Kiichiro
AU - Kawai, Yoshinobu
PY - 2016
Y1 - 2016
N2 - A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.
AB - A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.
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U2 - 10.7567/JJAP.55.07LD01
DO - 10.7567/JJAP.55.07LD01
M3 - Article
AN - SCOPUS:85012897927
VL - 55
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 7S2
M1 - 07LD01
ER -