Two-dimensional simulations of a VHF H2 plasma for different discharge gaps and gas pressures

Kuan Chen Chen, Kohei Ogiwara, Kuo Feng Chiu, Li Wen Su, Kiichiro Uchino, Yoshinobu Kawai

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3 Citations (Scopus)

Abstract

A two-dimensional simulation on a VHF H2 plasma (60 MHz) was performed using the plasma hybrid code, and plasma parameters were examined as a function of pressure for different discharge gaps. It was found that as the pressure increased, the H3 + and H+ densities as well as the electron density had a maximum at a certain pressure, and the maximum shifted to high pressures as the discharge gap decreased. On the other hand, the H2 + density decreased with the increase in pressure, independent of the discharge gap. The axial profiles of the H+, H2 +, and H3 + densities showed that dominant ions were H3 + in our pressure range.

Original languageEnglish
Article number07LD01
JournalJapanese journal of applied physics
Volume55
Issue number7S2
DOIs
Publication statusPublished - 2016

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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