Two-dimensional spatial profiles of size and density of participates grown in RF silane plasmas

Masaharu Shiratani; Nobuhiro Kishigaki; Hiroharu Kawasaki; Tsuyoshi Fukuzawa; Yukio Watanabe

doi:10.1109/27.491731

Two-dimensional spatial profiles of size and density of participates grown in RF silane plasmas

Masaharu Shiratani, Nobuhiro Kishigaki, Hiroharu Kawasaki, Tsuyoshi Fukuzawa, Yukio Watanabe

Electronic Devices

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Abstract

Two-dimensional (2-D) spatial profiles of size and density of particulates in RF silane plasmas have been measured simultaneously using a newly developed in situ polarization-sensitive laser light scattering method. Particulates are observed principally in the annular region, around the plasma/sheath boundary near the RF electrode. Their size and density are in ranges of 50 - 110 nm and 10⁶ - 10⁸ cm^-3, respectively. Furthermore, larger particulates tend to be localized nearer to the RF electrode and to about 10 mm off the discharge-column-axis. The observed profiles of particulates along the discharge-column-axis can be explained by a balance between electrostatic and ion drag forces exerted on them. Their annular radial profiles may be explained by taking into account that the ion density has the radial distribution, and the electric field around the plasma/sheath boundary has the radial component.

Original language	English
Pages (from-to)	99-100
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	24
Issue number	1
DOIs	https://doi.org/10.1109/27.491731
Publication status	Published - 1996

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Condensed Matter Physics

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10.1109/27.491731

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title = "Two-dimensional spatial profiles of size and density of participates grown in RF silane plasmas",

abstract = "Two-dimensional (2-D) spatial profiles of size and density of particulates in RF silane plasmas have been measured simultaneously using a newly developed in situ polarization-sensitive laser light scattering method. Particulates are observed principally in the annular region, around the plasma/sheath boundary near the RF electrode. Their size and density are in ranges of 50 - 110 nm and 106 - 108 cm-3, respectively. Furthermore, larger particulates tend to be localized nearer to the RF electrode and to about 10 mm off the discharge-column-axis. The observed profiles of particulates along the discharge-column-axis can be explained by a balance between electrostatic and ion drag forces exerted on them. Their annular radial profiles may be explained by taking into account that the ion density has the radial distribution, and the electric field around the plasma/sheath boundary has the radial component.",

author = "Masaharu Shiratani and Nobuhiro Kishigaki and Hiroharu Kawasaki and Tsuyoshi Fukuzawa and Yukio Watanabe",

note = "Funding Information: Manuscript received June 21, 1995. This work was supported in part by a Grant-in-Aid for Developmental Scientific Research and Scientific Research on Priority Areas by the Ministry of Education, Science, and Culture. The authors are with Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812-81, Japan. Publisher Item Identifier S 0093-38 13(96)02206-0.",

year = "1996",

doi = "10.1109/27.491731",

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T1 - Two-dimensional spatial profiles of size and density of participates grown in RF silane plasmas

AU - Shiratani, Masaharu

AU - Kishigaki, Nobuhiro

AU - Kawasaki, Hiroharu

AU - Fukuzawa, Tsuyoshi

AU - Watanabe, Yukio

N1 - Funding Information: Manuscript received June 21, 1995. This work was supported in part by a Grant-in-Aid for Developmental Scientific Research and Scientific Research on Priority Areas by the Ministry of Education, Science, and Culture. The authors are with Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki, Fukuoka 812-81, Japan. Publisher Item Identifier S 0093-38 13(96)02206-0.

PY - 1996

Y1 - 1996

N2 - Two-dimensional (2-D) spatial profiles of size and density of particulates in RF silane plasmas have been measured simultaneously using a newly developed in situ polarization-sensitive laser light scattering method. Particulates are observed principally in the annular region, around the plasma/sheath boundary near the RF electrode. Their size and density are in ranges of 50 - 110 nm and 106 - 108 cm-3, respectively. Furthermore, larger particulates tend to be localized nearer to the RF electrode and to about 10 mm off the discharge-column-axis. The observed profiles of particulates along the discharge-column-axis can be explained by a balance between electrostatic and ion drag forces exerted on them. Their annular radial profiles may be explained by taking into account that the ion density has the radial distribution, and the electric field around the plasma/sheath boundary has the radial component.

AB - Two-dimensional (2-D) spatial profiles of size and density of particulates in RF silane plasmas have been measured simultaneously using a newly developed in situ polarization-sensitive laser light scattering method. Particulates are observed principally in the annular region, around the plasma/sheath boundary near the RF electrode. Their size and density are in ranges of 50 - 110 nm and 106 - 108 cm-3, respectively. Furthermore, larger particulates tend to be localized nearer to the RF electrode and to about 10 mm off the discharge-column-axis. The observed profiles of particulates along the discharge-column-axis can be explained by a balance between electrostatic and ion drag forces exerted on them. Their annular radial profiles may be explained by taking into account that the ion density has the radial distribution, and the electric field around the plasma/sheath boundary has the radial component.

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Two-dimensional spatial profiles of size and density of participates grown in RF silane plasmas

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