Two-dimensional thickness measurements based on internal reflection ellipsometry

Soichi Otsuki, Kaoru Tamada, Shin Ichi Wakida

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

An imaging ellipsometer technique on internal reflection geometry that can measure the thickness distribution of a thin film possessing an assumed refractive index is described. Because a prism is used for the internal reflection geometry, it was theoretically predicted that angular derivation from the normal incidence on the prism surface affects only the ^ value by a factor of 0.97 at maximum. Measurements were carried out for an optical system of silica substrate-TiO2 layer-silica layer-protein film-air, with a thin-film array of dried protein as the sample film. Thickness of the protein films was two-dimensionally estimated only from the measured map of the A value by use of the simulated relationship between the thickness and the A value. The thickness map obtained was coincident on the whole with the results according to a mechanical scanning. The detection limit was approximately ±0.2 nm. These findings validate the optical effect of a high-index additional layer to improve the sensitivity and precision of thickness measurements of the sample film on transparent substrates.

Original languageEnglish
Pages (from-to)1410-1415
Number of pages6
JournalApplied Optics
Volume44
Issue number8
DOIs
Publication statusPublished - Mar 10 2005
Externally publishedYes

Fingerprint

Thickness measurement
Ellipsometry
ellipsometry
Prisms
Proteins
proteins
Silica
prisms
Thin films
Geometry
silicon dioxide
Substrates
Optical systems
ellipsometers
Refractive index
thin films
geometry
Scanning
Imaging techniques
derivation

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

Cite this

Two-dimensional thickness measurements based on internal reflection ellipsometry. / Otsuki, Soichi; Tamada, Kaoru; Wakida, Shin Ichi.

In: Applied Optics, Vol. 44, No. 8, 10.03.2005, p. 1410-1415.

Research output: Contribution to journalArticle

Otsuki, Soichi ; Tamada, Kaoru ; Wakida, Shin Ichi. / Two-dimensional thickness measurements based on internal reflection ellipsometry. In: Applied Optics. 2005 ; Vol. 44, No. 8. pp. 1410-1415.
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