Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering

Yasuhiro Takaya; Terutake Hayashi; Masaki Michihata

doi:10.2493/jjspe.80.514

Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering

Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata

Manufacturing Process

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	514-518
Number of pages	5
Journal	Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume	80
Issue number	6
DOIs	https://doi.org/10.2493/jjspe.80.514
Publication status	Published - Jun 2014

All Science Journal Classification (ASJC) codes

Mechanical Engineering

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10.2493/jjspe.80.514

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title = "Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering",

author = "Yasuhiro Takaya and Terutake Hayashi and Masaki Michihata",

year = "2014",

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journal = "Journal of the Japan Society for Precision Engineering",

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AU - Michihata, Masaki

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Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering

All Science Journal Classification (ASJC) codes

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