Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering

Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)514-518
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume80
Issue number6
DOIs
Publication statusPublished - Jun 2014

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All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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