Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering

Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)514-518
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume80
Issue number6
DOIs
Publication statusPublished - Jan 1 2014
Externally publishedYes

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Surface topography
Light scattering
Lasers

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

Cite this

Ultra-finished surface areal-topography analysis based on total angle-resolved laser light scattering. / Takaya, Yasuhiro; Hayashi, Terutake; Michihata, Masaki.

In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, Vol. 80, No. 6, 01.01.2014, p. 514-518.

Research output: Contribution to journalArticle

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