Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: Investigation of the performance in linear mode

Morio Ishihara, Shingo Ebata, Kousuke Kumondai, Ryo Mibuka, Kiichiro Uchino, Hisayoshi Yurimoto

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The performance of a newly developed TOF-SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF-SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm.

Original languageEnglish
Pages (from-to)1598-1602
Number of pages5
JournalSurface and Interface Analysis
Volume42
Issue number10-11
DOIs
Publication statusPublished - Oct 1 2010

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Chemistry
  • Surfaces, Coatings and Films

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