Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: Investigation of the performance in linear mode

Morio Ishihara; Shingo Ebata; Kousuke Kumondai; Ryo Mibuka; Kiichiro Uchino; Hisayoshi Yurimoto

doi:10.1002/sia.3611

Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: Investigation of the performance in linear mode

Morio Ishihara, Shingo Ebata, Kousuke Kumondai, Ryo Mibuka, Kiichiro Uchino, Hisayoshi Yurimoto

Electrical Engineering Sciences

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

The performance of a newly developed TOF-SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF-SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm.

Original language	English
Pages (from-to)	1598-1602
Number of pages	5
Journal	Surface and Interface Analysis
Volume	42
Issue number	10-11
DOIs	https://doi.org/10.1002/sia.3611
Publication status	Published - Oct 2010

All Science Journal Classification (ASJC) codes

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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10.1002/sia.3611

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AU - Kumondai, Kousuke

AU - Mibuka, Ryo

AU - Uchino, Kiichiro

AU - Yurimoto, Hisayoshi

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AB - The performance of a newly developed TOF-SIMS System with a femtosecond laser postionization and a multiturn mass spectrometer was investigated in linear mode. This system would be very effective for analyzing valuable material such as space samples. By using postionization the secondary ion signals of Ag were increased (up to 100 times), compared with the conventional TOF-SIMS experiments. The laser power dependence on the signal intensities was also investigated and it was confirmed that the signal intensities reached specific values above the specific laser power. Lateral resolution of the elemental map was calculated to be about 40 nm.

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Ultra-high performance multi-turn TOF-SIMS system with a femto-second laser for post-ionization: Investigation of the performance in linear mode

Abstract

All Science Journal Classification (ASJC) codes

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